1960-bell-labs-20-000-nm-pmos 1960 20,000 nm 20000 PMOS Bell Labs 1960-bell-labs-20-000-nm-nmos 1960 20,000 nm 20000 NMOS Bell Labs 1963-fairchild-unknown-cmos 1963 CMOS Fairchild 1964-general-microelectronics-unknown-pmos 1964 PMOS General Microelectronics 1968-rca-20-000-nm-cmos 1968 20,000 nm 20000 CMOS RCA 1969-intel-12-000-nm-pmos 1969 12,000 nm 12000 PMOS Intel 1970-rca-10-000-nm-cmos 1970 10,000 nm 10000 CMOS RCA 1970-intel-8-000-nm-pmos 1970 8,000 nm 8000 PMOS Intel 300 300 1971-intel-10-000-nm-pmos 1971 10,000 nm 10000 PMOS Intel 1971-general-instrument-unknown-pmos 1971 PMOS General Instrument 480 480 1973-texas-instruments-unknown-nmos 1973 NMOS Texas Instruments 1973-mostek-unknown-nmos 1973 NMOS Mostek 220 220 1973-nec-7-500-nm-nmos 1973 7,500 nm 7500 NMOS NEC 1973-toshiba-6-000-nm-pmos 1973 6,000 nm 6000 PMOS Toshiba 1976-hitachi-intel-5-000-nm-nmos 1976 5,000 nm 5000 NMOS Hitachi, Intel 1976-rca-5-000-nm-cmos 1976 5,000 nm 5000 CMOS RCA 1976-zilog-4-000-nm-nmos 1976 4,000 nm 4000 NMOS Zilog 1976-intel-3-000-nm-nmos 1976 3,000 nm 3000 NMOS Intel 1977-ntt-unknown-nmos 1977 NMOS NTT 1850 1850 1978-hitachi-3-000-nm-cmos 1978 3,000 nm 3000 CMOS Hitachi 1978-texas-instruments-2-500-nm-nmos 1978 2,500 nm 2500 NMOS Texas Instruments 1978-nec-ntt-2-000-nm-nmos 1978 2,000 nm 2000 NMOS NEC, NTT 1979-siemens-unknown-vmos 1979 VMOS Siemens 2600 2600 1979-ntt-1-000-nm-nmos 1979 1,000 nm 1000 NMOS NTT 7280 7280 1980-ntt-1-000-nm-nmos 1980 1,000 nm 1000 NMOS NTT 7620 7620 1983-toshiba-2-000-nm-cmos 1983 2,000 nm 2000 CMOS Toshiba 1983-intel-1-500-nm-cmos 1983 1,500 nm 1500 CMOS Intel 1983-intel-1-200-nm-cmos 1983 1,200 nm 1200 CMOS Intel 1984-ntt-800-nm-cmos 1984 800 nm 800 CMOS NTT 1987-fujitsu-700-nm-cmos 1987 700 nm 700 CMOS Fujitsu 1989-mitsubishi-nec-toshiba-600-nm-cmos 1989 600 nm 600 CMOS Mitsubishi, NEC, Toshiba 1989-hitachi-mitsubishi-nec-toshiba-500-nm-cmos 1989 500 nm 500 CMOS Hitachi, Mitsubishi, NEC, Toshiba 1991-matsushita-mitsubishi-fujitsu-toshiba-400-nm-cmos 1991 400 nm 400 CMOS Matsushita, Mitsubishi, Fujitsu, Toshiba 1993-sony-350-nm-cmos 1993 350 nm 350 CMOS Sony 1993-hitachi-nec-250-nm-cmos 1993 250 nm 250 CMOS Hitachi, NEC 1994-nec-350-nm-cmos 3LM 1994 350 nm 350 CMOS NEC 32000 32000 1995-hitachi-160-nm-cmos 1995 160 nm 160 CMOS Hitachi 1996-mitsubishi-150-nm-cmos 1996 150 nm 150 CMOS Mitsubishi 1998-tsmc-180-nm-cmos TSMC 180 nm 1998 180 nm 180 CMOS TSMC 1999-fujitsu-180-nm-cmos CS80 1999 180 nm 180 CMOS Fujitsu 1999-intel-sony-toshiba-180-nm-cmos 1999 180 nm 180 CMOS Intel, Sony, Toshiba 1999-fujitsu-170-nm-cmos CS85 1999 170 nm 170 CMOS Fujitsu 1999-samsung-140-nm-cmos Samsung 140 nm 1999 140 nm 140 CMOS Samsung 2001-fujitsu-intel-130-nm-cmos 2001 130 nm 130 CMOS Fujitsu, Intel 2001-samsung-100-nm-cmos Samsung 100 nm 2001 100 nm 100 CMOS Samsung 2002-sony-toshiba-samsung-90-nm-cmos 2002 90 nm 90 CMOS Sony, Toshiba, Samsung 2003-fujitsu-90-nm-cmos CS100 2003 90 nm 90 CMOS Fujitsu 2004-intel-90-nm-cmos Intel 90 nm 2004 90 nm 90 CMOS Intel 1450000 1450000 2004-samsung-80-nm-cmos Samsung 80 nm 2004 80 nm 80 CMOS Samsung 2004-fujitsu-toshiba-65-nm-cmos 2004 65 nm 65 CMOS Fujitsu, Toshiba 2004-samsung-60-nm-cmos Samsung 60 nm 2004 60 nm 60 CMOS Samsung 2004-tsmc-45-nm-cmos TSMC 45 nm 2004 45 nm 45 CMOS TSMC 2005-elpida-memory-90-nm-cmos Elpida 90 nm 2005 90 nm 90 CMOS Elpida Memory 2005-fujitsu-65-nm-cmos CS200 2005 65 nm 65 CMOS Fujitsu 2005-samsung-50-nm-cmos Samsung 50 nm 2005 50 nm 50 CMOS Samsung 2006-intel-65-nm-cmos Intel 65 nm 2006 65 nm 65 CMOS Intel 2080000 2080000 2006-samsung-40-nm-cmos Samsung 40 nm 2006 40 nm 40 CMOS Samsung 2007-toshiba-56-nm-cmos Toshiba 56 nm 2007 56 nm 56 CMOS Toshiba 2007-matsushita-45-nm-cmos Matsushita 45 nm 2007 45 nm 45 CMOS Matsushita 2008-intel-45-nm-cmos Intel 45 nm 2008 45 nm 45 CMOS Intel 3300000 3300000 2008-toshiba-43-nm-cmos Toshiba 43 nm 2008 43 nm 43 CMOS Toshiba 2008-tsmc-40-nm-cmos TSMC 40 nm 2008 40 nm 40 CMOS TSMC 2009-toshiba-32-nm-cmos Toshiba 32 nm 2009 32 nm 32 CMOS Toshiba 2010-intel-32-nm-cmos Intel 32 nm 2010 32 nm 32 CMOS Intel 7500000 7500000 2010-hynix-samsung-20-nm-cmos 2010 20 nm 20 CMOS Hynix, Samsung 2012-intel-22-nm-cmos Intel 22 nm 2012 22 nm 22 CMOS Intel 15300000 15300000 2012-imft-20-nm-cmos IMFT 20 nm 2012 20 nm 20 CMOS IMFT 2012-toshiba-19-nm-cmos Toshiba 19 nm 2012 19 nm 19 CMOS Toshiba 2013-sk-hynix-16-nm-finfet Hynix 16 nm 2013 16 nm 16 FinFET SK Hynix 2013-tsmc-16-nm-finfet TSMC 16 nm 2013 16 nm 16 FinFET TSMC 28880000 28880000 2013-samsung-10-nm-finfet Samsung 10 nm 2013 10 nm 10 FinFET Samsung 51820000 51820000 2014-intel-14-nm-finfet Intel 14 nm 2014 14 nm 14 FinFET Intel 37500000 37500000 2015-samsung-14-nm-finfet 14LP 2015 14 nm 14 FinFET Samsung 32940000 32940000 2016-tsmc-10-nm-finfet TSMC 10 nm 2016 10 nm 10 FinFET TSMC 52510000 52510000 2017-globalfoundries-samsung-12-nm-finfet 12LP 2017 12 nm 12 FinFET GlobalFoundries, Samsung 36710000 36710000 2017-tsmc-7-nm-finfet N7FF 2017 7 nm 7 FinFET TSMC 96500000 101850000 2018-samsung-8-nm-finfet 8LPP 2018 8 nm 8 FinFET Samsung 61180000 61180000 2018-samsung-7-nm-finfet 7LPE 2018 7 nm 7 FinFET Samsung 95300000 95300000 2018-intel-10-nm-finfet Intel 10 nm 2018 10 nm 10 FinFET Intel 100760000 106100000 2018-samsung-5-nm-finfet 5LPE 2018 5 nm 5 FinFET Samsung 126530000 134900000 2019-tsmc-7-nm-finfet N7FF+ 2019 7 nm 7 FinFET TSMC 113900000 113900000 2019-tsmc-5-nm-finfet CLN5FF 2019 5 nm 5 FinFET TSMC 171300000 185460000 2021-intel-7-nm-finfet Intel 7 2021 7 nm 7 FinFET Intel 100760000 106100000 2021-samsung-4-nm-finfet 4LPE 2021 4 nm 4 FinFET Samsung 145700000 145700000 2021-tsmc-4-nm-finfet N4 2021 4 nm 4 FinFET TSMC 196600000 196600000 2022-tsmc-4-nm-finfet N4P 2022 4 nm 4 FinFET TSMC 196600000 196600000 2022-samsung-3-nm-mbcfet 3GAE 2022 3 nm 3 MBCFET Samsung 202850000 202850000 2022-tsmc-3-nm-finfet N3 2022 3 nm 3 FinFET TSMC 314730000 314730000 2023-tsmc-4-nm-finfet N4X 2023 4 nm 4 FinFET TSMC 2023-tsmc-3-nm-finfet N3E 2023 3 nm 3 FinFET TSMC 2023-samsung-3-nm-mbcfet 3GAP 2023 3 nm 3 MBCFET Samsung 2023-intel-4-nm-finfet Intel 4 2023 4 nm 4 FinFET Intel 160000000 160000000 2023-intel-3-nm-finfet Intel 3 2023 3 nm 3 FinFET Intel 2024-intel-2-nm-ribbonfet Intel 20A 2024 2 nm 2 RibbonFET Intel 2025-intel-sub-2-nm-ribbonfet Intel 18A 2025 sub-2 nm RibbonFET Intel 238000000 238000000 2025-samsung-2-nm-mbcfet 2GAP 2025 2 nm 2 MBCFET Samsung 2025-tsmc-2-nm-gaafet N2 2025 2 nm 2 GAAFET TSMC